Institute of Solid State Physics, RAS, Chernogolovka, Russia

Institute of Semiconductor Physics, RAS, Novosibirsk, Russia

Institute of Novel Chemical Problems, RAS, Chernogolovka, Russia

Institute of Radioengineering and Electronics, RAS, Russia

Plant for Scientific Equipment Production, RAS, Chernogolovka, Russia

R&D Corporation Almaz, Moscow, Russia

R&D Corporation Mikron, Zelenograd, Moscow district, Russia

R&D Corporation Tsiklon, Moscow, Russia

R&D Corporation Istok, Frjazino, Moscow district, Russia

Lund University, Sweden

Epiquip AB, Sweden

Microscience, Inc., MA, USA

Hebei Semiconductor Research Institute, China

Lille University, France

M.E.C., Inc, NJ, USA